JPH02115564U - - Google Patents
Info
- Publication number
- JPH02115564U JPH02115564U JP2386289U JP2386289U JPH02115564U JP H02115564 U JPH02115564 U JP H02115564U JP 2386289 U JP2386289 U JP 2386289U JP 2386289 U JP2386289 U JP 2386289U JP H02115564 U JPH02115564 U JP H02115564U
- Authority
- JP
- Japan
- Prior art keywords
- rail gun
- cvd
- supplying
- utility
- reaction gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012495 reaction gas Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001182 laser chemical vapour deposition Methods 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2386289U JPH02115564U (en]) | 1989-03-03 | 1989-03-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2386289U JPH02115564U (en]) | 1989-03-03 | 1989-03-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02115564U true JPH02115564U (en]) | 1990-09-17 |
Family
ID=31243215
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2386289U Pending JPH02115564U (en]) | 1989-03-03 | 1989-03-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02115564U (en]) |
-
1989
- 1989-03-03 JP JP2386289U patent/JPH02115564U/ja active Pending